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| Zhengzhou Ketan Instrument Equipment Co., Ltd |
| Contacts：Mr.Song |
| Phone：0371-60308298 |
| E-mail：zzkejing@qq.com |
| Address：Floor 3, block K, building 6, innovation park, West Third Ring University Science Park, Zhengzhou City, Henan Province |
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plasma cleaning machine |
Classification：Material sample handling |
Hotline：0371-60308298 |
Product introduction：Mainly used in precision cleaning of semiconductor, coating process, PCB process, PCB process, component packaging, COG, vacuum electronics, connectors and relays and other industries, activation of plastic, rubber, metal and ceramic surfaces and life science experiments Wait. |
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The power supply of KT-S2DQX plasma cleaning machine is a 150W 13.56MHz radio frequency power supply. As a precision dry cleaning equipment, it is mainly used in precision cleaning of semiconductor, coating process, PCB process, PCB process, component packaging, COG, vacuum electronics, connectors and relays and other industries. Activation of surfaces such as ceramics and life science experiments.
The cleaning machine has a built-in high-purity quartz bin with a volume of 2 liters. The new appearance structure design and solid-state power supply technology are adopted to increase the effective volume, easy to match in different vacuum gas environments, and the control frequency is stable. The vacuum chamber door has an observation window, which can visualize the processing process of the object. Its radio frequency power supply and control are assembled in one chassis, which reduces the space occupation and is more convenient for operation and placement. At the same time, compared with large cleaning machines, from the detection function The settings and control functions can be operated on one panel, which is especially suitable for scientific experiment sample cleaning and teaching.
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Power supply |
AC220V (AC110V optional) |
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Working current |
The working current of the whole machine is not more than 3.5A (excluding vacuum pump) |
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RF power supply |
150W |
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RF frequency |
13.56MHz |
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frequency offset |
＜0.2MHz |
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Characteristic impedance |
50 ohms, manual matching 50 ohms, manual matching |
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Coupling |
capacitive coupling |
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degree of vacuum |
≤100Pa |
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Cavity material |
High Purity Quartz |
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Cavity volume |
2L (inner diameter 110MMX depth 220MM) |
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Observation window inner diameter |
Φ65 |
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Gas flow |
10—100ml/min (other ranges are optional) |
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Process control |
Process manual control |
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cleaning time |
Manual switch |
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Opening method |
Hinged side opening flange |
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Dimensions |
400x380x360mm |
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weight |
23Kg |
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vacuum chamber temperature |
less than 65°C |
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cooling method |
forced air cooling |
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Standard |
1 meter KF16 vacuum tube, 2 kf16 clamps, 1 stainless steel mesh box, 1 power cord, and 1 manual. |
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